CASES
Core Chromatography Wins Outstanding Paper Award at the National Specialty Gas Annual Conference, Unveiling a New Solution for Trace Analysis of Electronic-Grade Silicon Tetrachloride
From November 17 to November 19, the 40th Anniversary Celebration of the National Special Gas Information Center and the 27th National Special Gas Annual Conference successfully concluded in Wuhan. The event brought together nearly 400 experts, scholars, and industry professionals from China's special gas sector, who engaged in in-depth discussions and shared insights on key topics such as "China's Semiconductor Industry Development under New Circumstances," "Application for Standard Substances," and "Advanced Innovations in Electronic Gas Applications." Liaoning Kerei Chromatography Technology Co., Ltd. was proudly invited to attend and made a remarkable impression—our company’s paper, "Gas Chromatographic Analysis of Trace Impurities in Electronic-Grade Silicon Tetrachloride," was awarded the "Third Prize for Outstanding Paper" at the conference!
This honor is not only an authoritative recognition from industry experts of Corey Chromatography's R&D capabilities, but also a well-deserved affirmation of our contributions in the cutting-edge field of electronic specialty gases.
Tackling Industry Pain Points: The "Purity Battle" for Electronic Specialty Gases
Against the backdrop of continuous breakthroughs in semiconductor and chip manufacturing toward nanoscale processes, electronic specialty gases are truly the "lifeblood" flowing through chip production—whose purity directly determines the quality and performance of semiconductor devices. Silicon tetrachloride (SiCl₄), in particular, is an indispensable core material in both semiconductor fabrication and fiber-optic communication fields.
However, its application value is directly proportional to purity— even trace impurities at the ppb level (one part per billion) can cause a sharp drop in chip yield rates, or even render an entire batch of products defective. Traditional analytical methods often fall short when dealing with complex impurities, making it imperative to develop more precise and efficient analytical techniques to ensure the quality of specialty gases and safeguard industrial safety.
Corey Solution: The "Sharp Eye" for Precisely Detecting ppb-Level Impurities
Corey Chromatography’s award-winning paper directly addresses the industry challenges mentioned above, presenting a comprehensive and innovative solution. The technological core: GS2010 Gas Chromatograph + Pulsed Discharge Helium Ionization Detector (PDHID).
Our solution utilizes our company’s GS2010 gas chromatograph and innovatively incorporates an ultra-high-sensitivity pulse discharge helium ionization detector (PDHID). This detector responds to all substances with exceptional sensitivity, making it the key component for successfully completing this trace-level analysis task.
Method Innovation: Multi-column and Multi-valve Interlocking to Solve Separation Challenges
Facing the complex system where permanent gases and chlorosilane impurities coexist in silicon tetrachloride, we have designed an intelligent gas-path system featuring coordinated operation of "multiple columns and multiple valves." Through precise control mechanisms such as ten-way valve sampling with backflushing and six-way valve sampling combined with center-cutting techniques, we have achieved:
Quickly vent a large volume of the main component, silicon tetrachloride, to prevent it from masking trace impurity signals. Allow impurities with different properties to "follow their own paths," each entering a distinct chromatographic column for precise separation.
Ultimately, we successfully completed a comprehensive analysis—simultaneously—in the same system, covering ppb-level impurities such as hydrogen, oxygen, nitrogen, methane, carbon monoxide, as well as trichlorosilane, dichlorosilane, and monochlorosilane.
Excellent Performance: A Leap in Accuracy from ppm to ppb
After rigorous method validation, this solution demonstrates excellent performance:
High precision: The relative standard deviation (RSD) of repeated tests is less than 3%, ensuring stable and reliable results.
Low detection limit: The detection limits for multiple key impurities have been improved from the industry-standard ppm level (one part per million) to the ppb level, with the lowest reaching as low as 2 ppb—marking a breakthrough of an entire order of magnitude.
The clear chromatogram visually demonstrates that all impurity components have been completely separated, confirming the effectiveness of the method.
Why is Core able to repeatedly overcome challenges?
Since its establishment in 2002, Core Chromatography has remained steadfastly committed to the deep cultivation of gas chromatography technology. In 2007, seven experts from the National Chromatography Center at the Dalian Institute of Chemical Physics, Chinese Academy of Sciences, joined Core, helping us build a core team that is both highly experienced and technically proficient.
We uphold the corporate philosophy of "Striving for Perfection, Meticulous Attention to Detail," and remain committed to embracing diverse strengths while continuously innovating. It is this unwavering dedication to technology and the deep-rooted expertise we’ve cultivated that empowers us to play a vital role in driving the localization of specialty gases for electronics—leveraging our independent analytical expertise to safeguard the supply chain security of China’s burgeoning industrial sector.
If you're facing challenges in trace impurity analysis for electronic specialty gases or high-purity gases, Corey Chromatography is here to serve as your reliable technical partner.
Welcome to inquire about our free method development and sample testing services!
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